Title:
MEMS MANUFACTURING METHOD AND MEMS MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/158815
Kind Code:
A1
Abstract:
In order to solve the problem of shortening the TAT required for manufacturing an MEMS, this MEMS manufacturing method according to the present invention comprises: a step for extracting, from among multiple MEMSs prepared on a main surface of a substrate in advance, a first MEMS having a first characteristic at a level close to a required characteristic; and a step for directly processing the first MEMS so as to form a second MEMS having the required characteristic.
Inventors:
MACHIDA SHUNTARO (JP)
SUGII NOBUYUKI (JP)
WATANABE KEIJI (JP)
RYUZAKI DAISUKE (JP)
KAWAMURA TETSUFUMI (JP)
WATANABE KAZUKI (JP)
SUGII NOBUYUKI (JP)
WATANABE KEIJI (JP)
RYUZAKI DAISUKE (JP)
KAWAMURA TETSUFUMI (JP)
WATANABE KAZUKI (JP)
Application Number:
PCT/JP2016/058681
Publication Date:
September 21, 2017
Filing Date:
March 18, 2016
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
B81C1/00
Foreign References:
| JP2013024828A | 2013-02-04 | |||
| JPH10340700A | 1998-12-22 | |||
| JP2010105153A | 2010-05-13 | |||
| JP2004249457A | 2004-09-09 | |||
| JP2010232185A | 2010-10-14 |
Other References:
See also references of EP 3431440A4
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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