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Title:
MEMS RESONATOR
Document Type and Number:
WIPO Patent Application WO/2011/148630
Kind Code:
A1
Abstract:
The disclosed MEMS resonator is provided with an input port to which an input voltage is applied, an output port for outputting an output current, and a vibrator, and comprises N units (where N is an integer greater than or equal to 2) of MEMS resonating units which are connected to the input port and the output port, wherein the N units of MEMS resonating units are serially connected with respect to the input port.

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Inventors:
NAKAMURA KUNIHIKO
Application Number:
PCT/JP2011/002910
Publication Date:
December 01, 2011
Filing Date:
May 25, 2011
Export Citation:
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Assignee:
PANASONIC CORP (JP)
NAKAMURA KUNIHIKO
International Classes:
H03H9/24; H03B5/30
Domestic Patent References:
WO2007145127A12007-12-21
WO2006112260A12006-10-26
Foreign References:
JP2007150736A2007-06-14
JP2008177933A2008-07-31
JP2008545333A2008-12-11
Attorney, Agent or Firm:
TANAKA, Mitsuo et al. (JP)
Mitsuo Tanaka (JP)
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