Title:
MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2012/043464
Kind Code:
A1
Abstract:
Provided is a MEMS switch wherein worsening of isolation can be alleviated as much as possible, even when semiconductor material is used for a lever main-layer of a flexible lever upon which a movable terminal is formed. The MEMS switch (10-1) is provided with parasitic-capacitance inhibiting sections (RPC11, RPC12, RPC13) for inhibiting, in a state wherein two signal layers (16, 17) do not have continuity with each other, parasitic capacitance to be formed between the lever main-layer (13b) of the flexible lever (FL) and a first fixed terminal (16a), and parasitic capacitance to be formed between the lever main-layer (13b) of the flexible lever (FL) and a second fixed terminal (17a).
More Like This:
| JPS6191819 | RELAY |
Inventors:
FUJII TOMONORI (JP)
IRIEDA TAISEI (JP)
NAKAMURA KENTARO (JP)
TAKANO TAKAYUKI (JP)
OTA KENICHI (JP)
OGINO TSUYOSHI (JP)
IRIEDA TAISEI (JP)
NAKAMURA KENTARO (JP)
TAKANO TAKAYUKI (JP)
OTA KENICHI (JP)
OGINO TSUYOSHI (JP)
Application Number:
PCT/JP2011/071867
Publication Date:
April 05, 2012
Filing Date:
September 26, 2011
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
FUJII TOMONORI (JP)
IRIEDA TAISEI (JP)
NAKAMURA KENTARO (JP)
TAKANO TAKAYUKI (JP)
OTA KENICHI (JP)
OGINO TSUYOSHI (JP)
FUJII TOMONORI (JP)
IRIEDA TAISEI (JP)
NAKAMURA KENTARO (JP)
TAKANO TAKAYUKI (JP)
OTA KENICHI (JP)
OGINO TSUYOSHI (JP)
International Classes:
H01H57/00; B81B3/00
Foreign References:
| JP2009266615A | 2009-11-12 | |||
| JP2000149751A | 2000-05-30 | |||
| JP2000149750A | 2000-05-30 |
Attorney, Agent or Firm:
MURAKOSHI, SATOSHI (JP)
Tomohito Murakoshi (JP)
Tomohito Murakoshi (JP)
Download PDF:
Claims: