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Title:
MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2012/043464
Kind Code:
A1
Abstract:
Provided is a MEMS switch wherein worsening of isolation can be alleviated as much as possible, even when semiconductor material is used for a lever main-layer of a flexible lever upon which a movable terminal is formed. The MEMS switch (10-1) is provided with parasitic-capacitance inhibiting sections (RPC11, RPC12, RPC13) for inhibiting, in a state wherein two signal layers (16, 17) do not have continuity with each other, parasitic capacitance to be formed between the lever main-layer (13b) of the flexible lever (FL) and a first fixed terminal (16a), and parasitic capacitance to be formed between the lever main-layer (13b) of the flexible lever (FL) and a second fixed terminal (17a).

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Inventors:
FUJII, Tomonori (LTD. 16-20 Ueno, 6-chom, Taito-ku Tokyo 05, 〒1100005, JP)
藤井 知徳 (〒05 東京都台東区上野6丁目16番20号 太陽誘電株式会社内 Tokyo, 〒1100005, JP)
IRIEDA, Taisei (LTD. 16-20 Ueno, 6-chom, Taito-ku Tokyo 05, 〒1100005, JP)
入枝 泰成 (〒05 東京都台東区上野6丁目16番20号 太陽誘電株式会社内 Tokyo, 〒1100005, JP)
NAKAMURA, Kentaro (LTD. 16-20 Ueno, 6-chom, Taito-ku Tokyo 05, 〒1100005, JP)
中村 健太郎 (〒05 東京都台東区上野6丁目16番20号 太陽誘電株式会社内 Tokyo, 〒1100005, JP)
Application Number:
JP2011/071867
Publication Date:
April 05, 2012
Filing Date:
September 26, 2011
Export Citation:
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Assignee:
TAIYO YUDEN CO., LTD. (16-20, Ueno 6-chome, Taito-k, Tokyo 05, 〒1100005, JP)
太陽誘電株式会社 (〒05 東京都台東区上野6丁目16番20号 Tokyo, 〒1100005, JP)
FUJII, Tomonori (LTD. 16-20 Ueno, 6-chom, Taito-ku Tokyo 05, 〒1100005, JP)
藤井 知徳 (〒05 東京都台東区上野6丁目16番20号 太陽誘電株式会社内 Tokyo, 〒1100005, JP)
IRIEDA, Taisei (LTD. 16-20 Ueno, 6-chom, Taito-ku Tokyo 05, 〒1100005, JP)
入枝 泰成 (〒05 東京都台東区上野6丁目16番20号 太陽誘電株式会社内 Tokyo, 〒1100005, JP)
NAKAMURA, Kentaro (LTD. 16-20 Ueno, 6-chom, Taito-ku Tokyo 05, 〒1100005, JP)
International Classes:
H01H57/00; B81B3/00
Foreign References:
JP2009266615A2009-11-12
JP2000149751A2000-05-30
JP2000149750A2000-05-30
Attorney, Agent or Firm:
MURAKOSHI, Satoshi (5F Fuerte Kojimachi Building, 7-25 Kojimachi 1-chom, Chiyoda-ku Tokyo 83, 〒1020083, JP)
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Claims: