Title:
MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2016/202790
Kind Code:
A3
Abstract:
The invention relates to a MEMS transducer for interacting with a volume flow of a fluid, comprising a substrate having a cavity, and an electromechanical transducer which is connected to the substrate in the cavity and has an element which can be deformed along a lateral movement direction. A deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
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Inventors:
SCHENK HARALD (DE)
CONRAD HOLGER (DE)
GAUDET MATTHIEU (DE)
SCHIMMANZ KLAUS (DE)
LANGA SERGIU (DE)
KAISER BERT (DE)
CONRAD HOLGER (DE)
GAUDET MATTHIEU (DE)
SCHIMMANZ KLAUS (DE)
LANGA SERGIU (DE)
KAISER BERT (DE)
Application Number:
PCT/EP2016/063611
Publication Date:
February 09, 2017
Filing Date:
June 14, 2016
Export Citation:
Assignee:
FRAUNHOFER GES FORSCHUNG (DE)
International Classes:
H04R19/00; B81C1/00
Foreign References:
| DE102010029936A1 | 2011-12-15 | |||
| DE102012223605A1 | 2014-06-18 | |||
| EP2410768A1 | 2012-01-25 |
Attorney, Agent or Firm:
SCHENK, Markus et al. (DE)
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