Title:
METAL OXIDE DISPERSON AND METHOD FOR MANUFACTURING METAL OXIDE FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/248996
Kind Code:
A1
Abstract:
Provided is a metal oxide dispersion having excellent gap-fill performance, and a method of manufacturing a metal oxide film using the same. A metal oxide dispersion according to a first aspect of the present invention contains carboxylic acid having 9 or more carbon atoms, metal oxide nanoparticles surface-treated with a capping agent, and a solvent. A metal oxide dispersion according to a second aspect of the present invention contains carboxylic acid having a boiling point of 250˚C or higher under atmospheric pressure, metal oxide nanoparticles surface-treated with a capping agent, and a solvent. A method of manufacturing a metal oxide film according to a third aspect of the present invention comprises: a step for forming a coating film formed of the metal oxide dispersion described above; and a step for heating the coating film at a temperature of 165˚C or higher.
Inventors:
YAMAUCHI KENICHI (JP)
NODA KUNIHIRO (JP)
TAKAHASHI MICHIHITO (JP)
HARAGUCHI SAEKO (JP)
YAMANOUCHI ATSUSHI (JP)
SHIOTA DAI (JP)
NODA KUNIHIRO (JP)
TAKAHASHI MICHIHITO (JP)
HARAGUCHI SAEKO (JP)
YAMANOUCHI ATSUSHI (JP)
SHIOTA DAI (JP)
Application Number:
PCT/JP2023/022680
Publication Date:
December 28, 2023
Filing Date:
June 20, 2023
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD (JP)
International Classes:
C09D17/00; C09C3/08; C09D1/00; C09D7/62
Domestic Patent References:
| WO2016136765A1 | 2016-09-01 | |||
| WO2016136763A1 | 2016-09-01 | |||
| WO2008010533A1 | 2008-01-24 |
Foreign References:
| JP2005255997A | 2005-09-22 | |||
| JP2016040355A | 2016-03-24 |
Attorney, Agent or Firm:
SHOBAYASHI Masayuki et al. (JP)
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