METHOD AND APPARATUS FOR TREATING CONTAINERS

Title:

METHOD AND APPARATUS FOR TREATING CONTAINERS

Document Type and Number:

WIPO Patent Application WO/2012/122559

Kind Code:

A3

Abstract:

An apparatus for treating the surfaces of containers includes a chamber for holding a container and provides precursor materials via an annulus formed by coaxially arranged electrodes at which plasma is created upon application of voltage and the container is treated.

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Inventors:

STEVENS RONALD (US)
ORMONDE GABRIEL (US)
MITCHENER JAMES (US)

Application Number:

PCT/US2012/028660

Publication Date:

March 06, 2014

Filing Date:

March 10, 2012

Export Citation:

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Assignee:

KAIATECH INC (US)
STEVENS RONALD (US)
ORMONDE GABRIEL (US)
MITCHENER JAMES (US)

International Classes:

C23C16/32

Foreign References:

US20090061111A1	2009-03-05
US5736207A	1998-04-07
US6486593B1	2002-11-26
US5374314A	1994-12-20
US20090280268A1	2009-11-12

Other References: