Title:
METHOD FOR COATING OLED METAL MASK
Document Type and Number:
WIPO Patent Application WO/2021/167334
Kind Code:
A1
Abstract:
The present invention relates to a method for coating an OLED metal mask comprising a mask body and a coating layer coated to surround the mask body, the method comprising: a first input step for inputting trimethylaluminum gas; a second input step for inputting water vapor containing an inert gas in the first input step; and a discharging step for discharging the purge generated in the second input step.
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Inventors:
OH HEUNG SHIK (KR)
LEE CHANG HO (KR)
PARK SANG WON (KR)
HAN SANG JIN (KR)
LEE CHANG HO (KR)
PARK SANG WON (KR)
HAN SANG JIN (KR)
Application Number:
PCT/KR2021/002000
Publication Date:
August 26, 2021
Filing Date:
February 17, 2021
Export Citation:
Assignee:
WIZIT CO LTD (KR)
International Classes:
H01L51/56; C23C14/24; C23C16/04; G03F7/12; H01L51/00
Foreign References:
| KR20190094366A | 2019-08-13 | |||
| KR101456099B1 | 2014-11-03 | |||
| KR20140132520A | 2014-11-18 | |||
| KR20100036214A | 2010-04-07 | |||
| JP2014214367A | 2014-11-17 | |||
| KR102190908B1 | 2020-12-14 |
Attorney, Agent or Firm:
PATENT LAW FIRM GRAND KOREA (KR)
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