Title:
METHOD OF CONTROLLING AIR PRESSURE IN CHAMBER, APPARATUS FOR THE SAME, AND EXPOSURE APPARATUS
Document Type and Number:
WIPO Patent Application WO/1999/031561
Kind Code:
A1
Abstract:
A method of controlling air pressure in a chamber, wherein the air pressure in a chamber in which laser measurement is conducted is maintained at a set level with respect to the variation of an external air pressure, characterized by comprising detecting the external air pressure, determining a long-standing flat pressure value with respect to short-term fluctuation of the detected external air pressure, preparing a set inside-chamber air pressure by adding a predetermined air pressure to the flat pressure value thus determined, and detecting an inside-chamber air pressure while introducing an outside air so that the inside-chamber air pressure reaches the set air pressure.
Inventors:
MASADA MUTSUO (JP)
NAKATA MASAO (JP)
SHIRAISHI MASAHIRO (JP)
OGAWA MAKOTO (JP)
KATO KATSUHIRO (JP)
OKUBO YUKIHARU (JP)
NAKATA MASAO (JP)
SHIRAISHI MASAHIRO (JP)
OGAWA MAKOTO (JP)
KATO KATSUHIRO (JP)
OKUBO YUKIHARU (JP)
Application Number:
PCT/JP1998/005706
Publication Date:
June 24, 1999
Filing Date:
December 17, 1998
Export Citation:
Assignee:
NIKON CORP (JP)
ASAHI KOGYOSHA (JP)
MASADA MUTSUO (JP)
NAKATA MASAO (JP)
SHIRAISHI MASAHIRO (JP)
OGAWA MAKOTO (JP)
KATO KATSUHIRO (JP)
OKUBO YUKIHARU (JP)
ASAHI KOGYOSHA (JP)
MASADA MUTSUO (JP)
NAKATA MASAO (JP)
SHIRAISHI MASAHIRO (JP)
OGAWA MAKOTO (JP)
KATO KATSUHIRO (JP)
OKUBO YUKIHARU (JP)
International Classes:
G05D16/20; (IPC1-7): G05D16/20
Foreign References:
| JPH07192990A | 1995-07-28 | |||
| JPH07283114A | 1995-10-27 | |||
| JPH09115800A | 1997-05-02 | |||
| JPH06302498A | 1994-10-28 | |||
| JPH06275494A | 1994-09-30 |
Attorney, Agent or Firm:
Shiga, Masatake (Takadanobaba 3-chome Shinjuku-ku Tokyo, JP)
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