Title:
METHOD OF CREATING TEMPLATE FOR MATCHING, AS WELL AS DEVICE FOR CREATING TEMPLATE
Document Type and Number:
WIPO Patent Application WO/2011/013317
Kind Code:
A1
Abstract:
Disclosed is a method wherein a template for template matching is created with high accuracy and high efficiency. With respect to each individual pattern constituting a basic circuit, pattern information regarding a plurality of layers in a semiconductor device is memorized in a library. On the basis of the designation of the position and the layer, pattern information regarding the designated position and layer is extracted from the pattern information memorized in the aforementioned library. A template is created on the basis of the above-mentioned pattern information extracted.
Inventors:
MATSUOKA RYOICHI (JP)
SUGIYAMA AKIYUKI (JP)
TOYOTA YASUTAKA (JP)
SUGIYAMA AKIYUKI (JP)
TOYOTA YASUTAKA (JP)
Application Number:
PCT/JP2010/004588
Publication Date:
February 03, 2011
Filing Date:
July 15, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
MATSUOKA RYOICHI (JP)
SUGIYAMA AKIYUKI (JP)
TOYOTA YASUTAKA (JP)
MATSUOKA RYOICHI (JP)
SUGIYAMA AKIYUKI (JP)
TOYOTA YASUTAKA (JP)
International Classes:
G01B15/04; G01N23/225; G03F1/84; G06V10/772; H01L21/027; H01L21/66
Foreign References:
| JP2006351888A | 2006-12-28 | |||
| JPH0634722A | 1994-02-10 | |||
| JP2002353280A | 2002-12-06 | |||
| JPH11251224A | 1999-09-17 | |||
| JP2002050572A | 2002-02-15 |
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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