Title:
METHOD AND DEVICE FOR ANALYZING LAYER STRUCTURE OF MULTILAYER BODY USING X-RAY REFLECTANCE METHOD
Document Type and Number:
WIPO Patent Application WO/2010/131665
Kind Code:
A1
Abstract:
Disclosed is a method and device for accurately analyzing the layer structure of a multilayer body using an X-ray reflectance method. The method for analyzing the layer structure of a multilayer body using an X-ray reflectance method is provided with an irradiation step of irradiating a sample which is, for example, a multilayer film with X-ray from an X-ray source, a detection step of detecting X-rays reflected from the sample by means of a detector, a measurement step of measuring the X-ray reflectance which is the ratio of the detected X-rays to the applied X-ray by means of a measurement unit, and an analysis step of analyzing the measured X-ray reflectance by an analyzer in consideration of the decrease in the interference component produced by the interference between the reflected X-ray from the surface or the interface of the sample and the transmitted X-rays due to the diffuse scattering that X-ray are scattered at the surface or the interface of the sample by the irregularity of the surface or the interface in directions other than the direction of the specular when there is a surface roughness or an interface roughness in the sample.
Inventors:
FUJII YOSHIKAZU (JP)
Application Number:
PCT/JP2010/057994
Publication Date:
November 18, 2010
Filing Date:
May 12, 2010
Export Citation:
Assignee:
FUJII YOSHIKAZU (JP)
International Classes:
G01N23/201; G01B15/02
Foreign References:
| JPH116724A | 1999-01-12 | |||
| JP2006091017A | 2006-04-06 | |||
| JP2004093521A | 2004-03-25 | |||
| JP2008209176A | 2008-09-11 | |||
| JP2007051955A | 2007-03-01 | |||
| JPH116804A | 1999-01-12 |
Other References:
YOSHIKAZU FUJII: "Depth profile analysis of Surface layers using X-ray diffraction at Small glancing angle of incidence", X-SEN BUNSEKI NO SHINPO, vol. 39, 31 March 2008 (2008-03-31), pages 47 - 62
KAZUHIKO OMOTE ET AL.: "Hansha X-sen Shokaku Sanranho ni Yoru Hakumakuchu no Nano-ryushi-Kuko Size Sokutei", X-SEN BUNSEKI NO SHINPO, vol. 33, 31 March 2002 (2002-03-31), pages 185 - 195
KAZUHIKO OMOTE ET AL.: "Hansha X-sen Shokaku Sanranho ni Yoru Hakumakuchu no Nano-ryushi-Kuko Size Sokutei", X-SEN BUNSEKI NO SHINPO, vol. 33, 31 March 2002 (2002-03-31), pages 185 - 195
Attorney, Agent or Firm:
FUJIMOTO KENJI (JP)
Kenji Fujimoto (JP)
Kenji Fujimoto (JP)
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