Title:
METHOD AND DEVICE FOR DETERMINING PROCESSING CONDITIONS, DISPLAY AND DISPLAYING METHOD, PROCESSOR, MEASURING INSTRUMENT AND ALIGNER, SUBSTRATE PROCESSING SYSTEM, AND PROGRAM AND INFORMATION RECORDING MEDIUM
Document Type and Number:
WIPO Patent Application WO/2007/086511
Kind Code:
A1
Abstract:
At the first step A, a transfer position measured actually by a measuring/inspecting instrument is shown by a black circle. A target transfer position shown by Χ at step B is located at the same position as that of the black circle. Assuming the weights at the subsequent steps are identical, a target transfer position Xtarget shown by Χ at each of steps C, D and E is located at a moderate position where a total deviation from an actual transfer position (black circle) measured at the step preceding that layer by the measuring/inspecting instrument is minimized, i.e. a proper position for a plurality of other steps. Consequently, productivity of a device can be enhanced.
Inventors:
OKITA SHINICHI (JP)
Application Number:
PCT/JP2007/051276
Publication Date:
August 02, 2007
Filing Date:
January 26, 2007
Export Citation:
Assignee:
NIKON CORP (JP)
OKITA SHINICHI (JP)
OKITA SHINICHI (JP)
International Classes:
H01L21/027; H01L21/02
Foreign References:
| JP2004228153A | 2004-08-12 | |||
| JPH08274017A | 1996-10-18 | |||
| JP2004311773A | 2004-11-04 | |||
| JPH0536583A | 1993-02-12 | |||
| JP2004343113A | 2004-12-02 |
Attorney, Agent or Firm:
TATEISHI, Atsuji (Karakida Center Bldg. 1-53.9, Karakid, Tama-shi Tokyo, JP)
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