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Title:
METHOD AND DEVICE FOR INSPECTING FILM, AND METHOD FOR FORMING FILM
Document Type and Number:
WIPO Patent Application WO/2019/123700
Kind Code:
A1
Abstract:
In a method and a device for inspecting a film, and a method for forming a film, the inspecting method includes: a step of radiating light onto a surface of a glass film formed on a blade portion (13) of a moving blade (10); and a step of determining the quality of the surface roughness of the glass film on the basis of the state of an image of light (41) reflected from the surface of the glass film.

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Inventors:
FUKUHARA YOSHIYA (JP)
OKUI HIDETAKA (JP)
TERASAWA MASATO (JP)
KONDO MASANORI (JP)
FUJITA NAOYA (JP)
AKAGI KOICHI (JP)
Application Number:
PCT/JP2018/026917
Publication Date:
June 27, 2019
Filing Date:
July 18, 2018
Export Citation:
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Assignee:
MITSUBISHI HITACHI POWER SYS (JP)
International Classes:
G01N21/88; G01B11/30; F02C7/00
Foreign References:
JPS6491009A1989-04-10
JPH109836A1998-01-16
JP2001099632A2001-04-13
JPH07249599A1995-09-26
JP2000346642A2000-12-15
JP2011117793A2011-06-16
JPH05164696A1993-06-29
JP2011241800A2011-12-01
US20130321805A12013-12-05
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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