Title:
METHOD AND DEVICE FOR MEASURING HIGH-FREQUENCY CURRENT FOR USE IN PLASMA GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/125379
Kind Code:
A1
Abstract:
The present invention involves: positioning pick-up coils (41, 42) for which the surface areas are Sout and Sin to the outside and inside of a first line (21) in the center thereof, in a manner such the centers of the two coils are separated from the center axis of the line (21) by an equal distance (r); measuring the induced electromotive force (Vout, Vin) produced by the two pick-up coils (41, 42); and calculating the high-frequency current (I1) flowing through the line (21) by using this formula. I1=(πr/μd){(r+d)(1/2πfSout)Vout-(-r+d)(1/2πfSin)Vin}
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Inventors:
ANDO YASUNORI (JP)
Application Number:
PCT/JP2014/082387
Publication Date:
August 27, 2015
Filing Date:
December 08, 2014
Export Citation:
Assignee:
NISSIN ELECTRIC CO LTD (JP)
International Classes:
H05H1/00; G01R19/00; H01L21/205; H01L21/3065; H05H1/46
Domestic Patent References:
| WO2011155526A1 | 2011-12-15 |
Foreign References:
| JP2010157511A | 2010-07-15 | |||
| JP2007266365A | 2007-10-11 | |||
| JP2004200233A | 2004-07-15 | |||
| JPH0325375A | 1991-02-04 | |||
| JP2010238981A | 2010-10-21 |
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