METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT

Title:

METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT

Document Type and Number:

WIPO Patent Application WO/2013/099579

Kind Code:

A1

Abstract:

A method and a device for producing an organic EL element are provided that make it possible to deposit vaporized material from a vapor deposition source in a desired pattern on a substrate without the need for a conventional band-shaped shadow mask. A shield unit is configured to be switchable between: a shield position for shielding the substrate, said position being located between a vapor deposition source and a substrate; and a shield release position in which the shield unit is withdrawn from between the vapor deposition source and the substrate so that the substrate is no longer shielded. The shield unit moves in the travel direction at the same speed as the substrate when positioned in the shield position, and moves in the opposite direction of the travel direction when positioned in the shield release position.

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Inventors:

KAKIUCHI RYOHEI (JP)
YAMAMOTO SATORU (JP)
HIDA KANAKO (JP)

Application Number:

PCT/JP2012/081976

Publication Date:

July 04, 2013

Filing Date:

December 10, 2012

Export Citation:

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Assignee:

NITTO DENKO CORP (JP)

International Classes:

H05B33/10; C23C14/24; H01L51/50

Foreign References:

JP2007059188A	2007-03-08
JP2003249211A	2003-09-05
JP2000183500A	2000-06-30

Other References: