Title:
METHOD FOR DRIVING GAS SENSOR AND GAS DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/213223
Kind Code:
A1
Abstract:
Provided is a method for driving a gas sensor (100) that includes a first electrode (103) having a first main surface, a second electrode (106) having a second main surface, a metal oxide layer (104) disposed so as to be sandwiched between the first main surface and the second main surface which are disposed opposing each other, and an insulating film (102) covering the first electrode (103), the metal oxide layer (104), and the second electrode (106) and exposing at least the second main surface of the second electrode (106) and a portion of a third main surface of the second electrode (106) on the opposite side from the second main surface, and that senses hydrogen according to a change in the resistance value of the metal oxide layer (104) when the portion of the third main surface contacts gas containing gaseous molecules having hydrogen atoms while a voltage is applied between the first electrode (103) and the second electrode (106). The method for driving this gas sensor (100) involves repeatedly applying a positive voltage and a negative voltage between the first electrode (103) and the second electrode (106) (S301, S302).
Inventors:
HOMMA KAZUNARI
KATAYAMA KOJI
MURAOKA SHUNSAKU
KAWAI KEN
KATAYAMA KOJI
MURAOKA SHUNSAKU
KAWAI KEN
Application Number:
PCT/JP2020/002233
Publication Date:
October 22, 2020
Filing Date:
January 23, 2020
Export Citation:
Assignee:
PANASONIC SEMICONDUCTOR SOLUTIONS CO LTD (JP)
International Classes:
G01N27/12
Domestic Patent References:
| WO2018123674A1 | 2018-07-05 | |||
| WO2018123673A1 | 2018-07-05 |
Foreign References:
| JP2017215312A | 2017-12-07 | |||
| JP2017173307A | 2017-09-28 | |||
| JP2013068567A | 2013-04-18 | |||
| JP2002340830A | 2002-11-27 | |||
| JP2017151091A | 2017-08-31 | |||
| JP2017198661A | 2017-11-02 | |||
| JP2011215105A | 2011-10-27 |
Attorney, Agent or Firm:
NII, Hiromori et al. (JP)
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