Title:
METHOD OF EXTRACTING CONTOUR LINES OF IMAGE DATA OBTAINED BY MEANS OF CHARGED PARTICLE BEAM DEVICE, AND CONTOUR LINE EXTRACTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/090111
Kind Code:
A1
Abstract:
Disclosed is a contour extraction method aiming to suppress unnecessary contour processing, or, selectively creating contour lines of necessary parts; also disclosed is a contour extraction device. The contour device extracts contour lines of pattern edges on an image formed on the basis of charged particles emitted from a sample. When the contour lines are extracted from the pattern located in an overlapping area created when images of multiple imaging areas are connected to form a synthesized image, surface areas of said pattern in the aforementioned multiple imaging areas, or pre-set measurement sites, are found, and selective contour line extraction of the aforementioned pattern is performed on the image of the imaging area of the larger of said surface areas, or on the side where the measurement site of said pattern is located.
Inventors:
MITO HIROAKI (JP)
MATSUOKA RYOICHI (JP)
MATSUOKA RYOICHI (JP)
Application Number:
PCT/JP2011/050965
Publication Date:
July 28, 2011
Filing Date:
January 20, 2011
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
MITO HIROAKI (JP)
MATSUOKA RYOICHI (JP)
MITO HIROAKI (JP)
MATSUOKA RYOICHI (JP)
International Classes:
G01B15/04; G01N23/225; G03F1/84; G03F1/86; H01L21/66
Foreign References:
| JP2009043937A | 2009-02-26 | |||
| JP2009157543A | 2009-07-16 | |||
| JP2009044070A | 2009-02-26 | |||
| JP2005079274A | 2005-03-24 | |||
| JP2004072533A | 2004-03-04 | |||
| JPH1117924A | 1999-01-22 | |||
| JP2008252716A | 2008-10-16 | |||
| JPH0923330A | 1997-01-21 |
Attorney, Agent or Firm:
ASAMURA PATENT OFFICE, p. c. (JP)
Patent business corporation Asamura patent firm (JP)
Patent business corporation Asamura patent firm (JP)
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Claims: