Title:
METHOD FOR FABRICATING FINE CONDUCTIVE PATTERNS USING A SURFACE-MODIFIED MASK TEMPLATE
Document Type and Number:
WIPO Patent Application WO/2011/049283
Kind Code:
A1
Abstract:
The present invention relates to a method for fabricating fine conductive patterns using a surface-modified mask template with a hydrophobic material, the method comprising: a polymeric material deposition step, in which a polymeric material is deposited on a substrate; a hydrophobic material application step, in which a hydrophobic material is applied onto the polymeric material to penetrate the hydrophobic material into the polymeric material; a mask template formation step, in which a part of the polymeric material is removed to expose certain areas of the substrate to the outside and form recessed portions; an ink deposition step, in which conductive ink is deposited on the mask template; and a heat treatment step, in which heat is applied to extract metal particles from a metallic compound dissolved in the conductive ink such that the area where the polymeric material is applied forms an insulated pattern having electrical insulating properties, while the conductive ink within the recessed portions forms conductive patterns having electrical conductive properties as the metal particles are extracted.
Inventors:
SHIN DONG-YOUN (KR)
LEE TAIK-MIN (KR)
LEE TAIK-MIN (KR)
Application Number:
PCT/KR2010/003664
Publication Date:
April 28, 2011
Filing Date:
June 08, 2010
Export Citation:
Assignee:
KOREA MACH & MATERIALS INST (KR)
SHIN DONG-YOUN (KR)
LEE TAIK-MIN (KR)
SHIN DONG-YOUN (KR)
LEE TAIK-MIN (KR)
International Classes:
H01L21/027
Foreign References:
| US20040203235A1 | 2004-10-14 | |||
| US4344817A | 1982-08-17 |
Attorney, Agent or Firm:
CHO, YOUNG HYUN (KR)
์กฐ์ํ (KR)
์กฐ์ํ (KR)
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