Title:
METHOD OF FABRICATION OF THIN FILM RESISTOR WITH 0 CTR
Document Type and Number:
WIPO Patent Application WO2005020250
Kind Code:
A3
Abstract:
A thin film resistor that has a substantially zero TCR is provided as well as a method for fabricating the same. The thin film resistor includes at least two resistor materials located over one another. Each resistor material has a different temperature coefficient of resistivity such that the effective temperature coefficient of resistivity of the thin film resistor is substantially 0 ppm/°C. The thin film resistor may be integrated into a interconnect structure or it may be integrated with a metal-insulator-metal capacitor (MIMCAP).
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Inventors:
AMADON JEFFREY R (US)
CHINTHAKINDI ANIL K (US)
WONG KWONG H (US)
CHINTHAKINDI ANIL K (US)
WONG KWONG H (US)
Application Number:
PCT/EP2004/050918
Publication Date:
May 06, 2005
Filing Date:
May 26, 2004
Export Citation:
Assignee:
IBM (US)
IBM FRANCE (FR)
AMADON JEFFREY R (US)
CHINTHAKINDI ANIL K (US)
WONG KWONG H (US)
IBM FRANCE (FR)
AMADON JEFFREY R (US)
CHINTHAKINDI ANIL K (US)
WONG KWONG H (US)
International Classes:
H01C7/00; H01C7/06; (IPC1-7): H01C7/06; H01C7/00
Foreign References:
| US4104607A | 1978-08-01 | |||
| US4320165A | 1982-03-16 | |||
| EP1258912A2 | 2002-11-20 | |||
| US20020155676A1 | 2002-10-24 | |||
| US20020153551A1 | 2002-10-24 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 0021, no. 34 (E - 070) 9 November 1978 (1978-11-09)
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