Title:
METHOD FOR MAKING MICROMOLDS
Document Type and Number:
WIPO Patent Application WO2002032636
Kind Code:
A3
Abstract:
A method is disclosed to form micromolds and micromold components from mixtures of micrometer or nanometer-sized particulates dispersed in an organic binder. Following extraction of the organic binder, the green micromolds or micromold components are sintered to full density, upon which they shrink by accurately predetermined amounts. The method allows to achieve compex-shaped micrometer and nanometer-sized precision parts such as MEMS and MEMS packages.
Inventors:
BILLIET ROMAIN L (MY)
NGUYEN HANH T (MY)
NGUYEN HANH T (MY)
Application Number:
PCT/IB2001/001900
Publication Date:
July 04, 2002
Filing Date:
October 11, 2001
Export Citation:
Assignee:
BILLIET ROMAIN L (MY)
NGUYEN HANH T (MY)
NGUYEN HANH T (MY)
International Classes:
B22F1/10; B22F5/00; B28B7/34; C04B35/622; H01L21/56; H01L23/29; (IPC1-7): B28B7/34; C04B35/638; C04B35/622
Foreign References:
| US5234655A | 1993-08-10 | |||
| EP0676381A1 | 1995-10-11 | |||
| US5735985A | 1998-04-07 | |||
| DE19858531C1 | 2000-03-23 | |||
| US6063314A | 2000-05-16 | |||
| US5824250A | 1998-10-20 |
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