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Title:
METHOD FOR MANUFACTURING ALUMINUM SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2023/121280
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing an aluminum sputtering target, comprising the steps of: casting an aluminum material so as to form aluminum billets; and extruding the aluminum billets, wherein the purity of the aluminum material can be 3N-7N.

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Inventors:
LEE JIN KYU (KR)
KIM SUN KI (KR)
PARK SUNG MIN (KR)
Application Number:
PCT/KR2022/020933
Publication Date:
June 29, 2023
Filing Date:
December 21, 2022
Export Citation:
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Assignee:
NICE LMS CO LTD (KR)
International Classes:
C23C14/34; C22F1/04
Foreign References:
JP2007063621A2007-03-15
KR20080100445A2008-11-18
US20010047838A12001-12-06
JP2005509741A2005-04-14
KR20010032530A2001-04-25
Attorney, Agent or Firm:
LEE, In Haeng et al. (KR)
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