Title:
METHOD FOR MANUFACTURING ALUMINUM SPUTTERING TARGET
Document Type and Number:
WIPO Patent Application WO/2023/121281
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing an aluminum sputtering target, and the method may comprise the steps of: casting an aluminum raw material to form an aluminum billet; extruding the aluminum billet into an aluminum sheet; and rolling the extruded aluminum sheet, wherein the purity of the aluminum raw material may range from 3N to 7N.
Inventors:
LEE JIN KYU (KR)
KIM SUN KI (KR)
PARK SUNG MIN (KR)
KIM SUN KI (KR)
PARK SUNG MIN (KR)
Application Number:
PCT/KR2022/020935
Publication Date:
June 29, 2023
Filing Date:
December 21, 2022
Export Citation:
Assignee:
NICE LMS CO LTD (KR)
International Classes:
C23C14/34; C22F1/04
Foreign References:
| JP2007063621A | 2007-03-15 | |||
| KR20080100445A | 2008-11-18 | |||
| US20010047838A1 | 2001-12-06 | |||
| JP2005509741A | 2005-04-14 | |||
| JPH11335826A | 1999-12-07 |
Attorney, Agent or Firm:
LEE, In Haeng et al. (KR)
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