Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR MANUFACTURING ARRAY SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2018/176880
Kind Code:
A1
Abstract:
A method for manufacturing an array substrate, comprising: sequentially forming a first metal layer (2), a gate layer (3), a gate insulating layer (4), a semiconductor layer (5), a second metal layer (6), a source layer (7), and a drain layer (8) on a substrate base (1). Forming the gate layer on the first metal layer comprises: depositing a gate metal layer and performing exposure, development and wet etching; and removing a photoresist layer, metal cations with a chemical corrosion potential less than or equal to that of the first metal layer being added in a stripping liquid. The problem of short circuit is avoided.

More Like This:
JP2001023899SEMICONDUCTOR THIN FILM, LIQUID CRYSTAL DISPLAY DEVICE PROVIDED WITH THE SAME, AND MANUFACTURE OF THE FILM
WO/2019/015055MANUFACTURING METHOD FOR AMOLED DEVICE ARRAY SUBSTRATE
WO/2021/114471ARRAY SUBSTRATE AND FABRICATING METHOD THEREFOR, AND DISPLAY PANEL
Inventors:
JIANG CHUNSHENG (CN)
WU YUE (CN)
Application Number:
PCT/CN2017/113328
Publication Date:
October 04, 2018
Filing Date:
November 28, 2017
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L21/77
Foreign References:
CN107026120A2017-08-08
CN104952932A2015-09-30
JP2004212818A2004-07-29
CN1875325A2006-12-06
US20040166675A12004-08-26
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: LASER MARKING MACHINE, METHOD FOR ADJUSTING DISTANCE BETWEEN SCANNING HEAD AND OBJECT FOR MARKING, A...

Next Patent: SEMI-TRANSPARENT SOLAR CELL DEVICE AND APPLICATION