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Title:
METHOD FOR MANUFACTURING CERAMIC ELEMENT
Document Type and Number:
WIPO Patent Application WO/2012/133530
Kind Code:
A1
Abstract:
Provided is a technique by which a ceramic substrate can be favorably divided. Due to this technique, defects can be suppressed in the subsequent processing steps. A method for manufacturing a ceramic element (62) comprises: a fixation step wherein a ceramic substrate (10) is affixed to a reinforcing plate (20) with a sacrificial layer (30) being interposed therebetween; a groove formation step wherein the ceramic substrate (10) is divided into a plurality of pieces by forming grooves on the upper surface of the ceramic substrate (10), said grooves penetrating through the ceramic substrate (10) and the sacrificial layer (30) and reaching the reinforcing plate (20); and a sacrificial layer removal step wherein the sacrificial layer (30) is removed.

Inventors:
UETANI MASAYUKI (JP)
OHNISHI TAKAO (JP)
KAKU KEN (JP)
Application Number:
PCT/JP2012/058131
Publication Date:
October 04, 2012
Filing Date:
March 28, 2012
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
UETANI MASAYUKI (JP)
OHNISHI TAKAO (JP)
KAKU KEN (JP)
International Classes:
B28B11/14; B28D5/00
Foreign References:
JP2004126152A2004-04-22
JP2008053250A2008-03-06
JP2009133924A2009-06-18
JPS6333840A1988-02-13
Attorney, Agent or Firm:
KAI-U PATENT LAW FIRM (JP)
Patent business corporation KAI-U Patent Law Firm (JP)
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Claims: