Title:
METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE
Document Type and Number:
WIPO Patent Application WO/2015/060190
Kind Code:
A1
Abstract:
[Problem] To provide a method for manufacturing an optical waveguide for which signal loss characteristics are extremely low, for which high density surface mounting and high-speed operation are possible, and which constitutes optical conversion components with which high productivity can be achieved.
[Solution] Provided is a method for manufacturing an optical waveguide that propagates light from a surface of a support body in an oblique direction rather than orthogonal to that surface, including (1) a step for installing and antireflective film on the support body, (2) a step for disposing a light sensitive resin composition on the antireflective film, exposing and curing the light sensitive resin composition with light rays incident from a non-orthogonal direction with respect to the support body surface through a photomask, and (3) a step for eliminating unexposed light sensitive resin composition by development. Also provided is an optical waveguide obtained by this manufacturing method.
More Like This:
Inventors:
MIKAMI OSAMU (JP)
OHMORI KENTARO (JP)
NAWATA HIDEYUKI (JP)
OHMORI KENTARO (JP)
NAWATA HIDEYUKI (JP)
Application Number:
PCT/JP2014/077551
Publication Date:
April 30, 2015
Filing Date:
October 16, 2014
Export Citation:
Assignee:
UNIV TOKAI EDUCATIONAL SYSTEM (JP)
NISSAN CHEMICAL IND LTD (JP)
NISSAN CHEMICAL IND LTD (JP)
International Classes:
G02B6/138; C09D183/04; G02B1/11; G02B6/12; G02B6/122; G03F7/11; G03F7/20; H01L21/027
Domestic Patent References:
| WO2004073972A1 | 2004-09-02 |
Foreign References:
| JP2007078818A | 2007-03-29 | |||
| JP2013045028A | 2013-03-04 | |||
| JP2006501523A | 2006-01-12 | |||
| JP2007525685A | 2007-09-06 | |||
| JP2005084165A | 2005-03-31 | |||
| JP2007334343A | 2007-12-27 |
Other References:
MASAHIRO KANDA ET AL.: "Self-Written Optical Connection Rod on VCSEL Fabricated by Mask Transfer Method and Its Optical Characteristics", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. J90-C, 1 November 2007 (2007-11-01), pages 785 - 792, XP008185216
YUSUKE OBATA ET AL.: "Multi-array Self-Written Waveguides using a photo-mask", PROCEEDINGS OF JIEP ANNUAL MEETING, 20 April 2005 (2005-04-20), XP008183472
See also references of EP 3062134A4
YUSUKE OBATA ET AL.: "Multi-array Self-Written Waveguides using a photo-mask", PROCEEDINGS OF JIEP ANNUAL MEETING, 20 April 2005 (2005-04-20), XP008183472
See also references of EP 3062134A4
Attorney, Agent or Firm:
HANABUSA PATENT & TRADEMARK OFFICE (JP)
A patent business corporation is a なぶさ patent trademark office. (JP)
A patent business corporation is a なぶさ patent trademark office. (JP)
Download PDF:
Previous Patent: CATALYST FOR PRODUCING HIGHER SILANE AND METHOD FOR PRODUCING HIGHER SILANE
Next Patent: BASE STATION AND PROCESSOR
Next Patent: BASE STATION AND PROCESSOR