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Title:
METHOD FOR MANUFACTURING PEROVSKITE THIN-FILM SOLAR BATTERY
Document Type and Number:
WIPO Patent Application WO/2022/172869
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a perovskite thin-film solar battery capable of reducing a decrease in the performance of a perovskite thin film caused by heat and moisture. This method for manufacturing a perovskite thin-film solar battery includes a step for forming a perovskite thin film on a substrate 10. The step for forming a perovskite thin film includes: a first PVD step for atomizing, by using a mist PVD method using a heating furnace 210, an aqueous solution resulting from dissolving a PbX2 particulate material in water and growing a PbX2 material film on the substrate 10 by introducing a mist of the aqueous solution into the heating furnace 210 (X represents a halogen atom); and a second PVD step for growing a MAX material film on the substrate by using a vapor deposition method using a vacuum chamber and forming a perovskite thin film made of MAPbX3 by causing the PbX2 material film to react with the MAX material film, said first PVD step and second PVD step being executed in that order.

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Inventors:
KUDO YUYA (JP)
Application Number:
PCT/JP2022/004427
Publication Date:
August 18, 2022
Filing Date:
February 04, 2022
Export Citation:
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Assignee:
KANEKA CORP (JP)
International Classes:
H01L51/44; H01L51/48
Domestic Patent References:
WO2020246764A12020-12-10
Foreign References:
CN104409639A2015-03-11
JP2018125359A2018-08-09
JP2017133077A2017-08-03
CN112349844A2021-02-09
CN111403612A2020-07-10
US20180261394A12018-09-13
Other References:
SANDERS S., STÜMMLER D., GERBER J. D., SEIDEL J. H., SIMKUS G., HEUKEN M., VESCAN A., KALISCH H.: "Showerhead-Assisted Chemical Vapor Deposition of Perovskite Films for Solar Cell Application", MRS ADVANCES, vol. 5, no. 8-9, 1 February 2020 (2020-02-01), pages 385 - 393, XP055945670, DOI: 10.1557/adv.2020.126
Attorney, Agent or Firm:
NIIYAMA Yuichi et al. (JP)
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