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Title:
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/043124
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a crystalline silicon photoelectric conversion device. A crystalline silicon photoelectric conversion device according to the present invention comprises a layer-side intrinsic silicon layer of one conductivity type and a silicon layer of the one conductivity type in this order on one surface of a single crystal silicon substrate of the one conductivity type, while comprising a layer-side intrinsic silicon layer of the opposite conductivity type and a silicon layer of the opposite conductivity type in this order on the other surface of the single crystal silicon substrate of the one conductivity type. The step for forming the layer-side intrinsic silicon layer of the one conductivity type and/or the step for forming the layer-side intrinsic silicon layer of the opposite conductivity type comprises, in the following order: a step in which a first intrinsic silicon thin film layer that has a film thickness of 1-10 nm is formed on the single crystal silicon substrate of the one conductivity type by a plasma CVD method; a step in which plasma processing is carried out in a gas atmosphere that is mainly composed of hydrogen; and a step in which a second intrinsic silicon thin film layer is formed on the first intrinsic silicon thin film layer by a plasma CVD method.

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Inventors:
YOSHIMI MASASHI (JP)
ICHIKAWA MITSURU (JP)
UTO TOSHIHIKO (JP)
YAMAMOTO KENJI (JP)
Application Number:
PCT/JP2011/069811
Publication Date:
April 05, 2012
Filing Date:
August 31, 2011
Export Citation:
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Assignee:
KANEKA CORP (JP)
YOSHIMI MASASHI (JP)
ICHIKAWA MITSURU (JP)
UTO TOSHIHIKO (JP)
YAMAMOTO KENJI (JP)
International Classes:
H01L31/04
Foreign References:
JPH10135497A1998-05-22
JPH0982996A1997-03-28
JP2003303984A2003-10-24
JPH06196729A1994-07-15
JP2841335B21998-12-24
JP4171428B22008-10-22
JPH06105691B21994-12-21
Other References:
See also references of EP 2624307A4
Attorney, Agent or Firm:
SHINTAKU, Masato et al. (JP)
Masahito Shintaku (JP)
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