Title:
METHOD FOR MANUFACTURING PHOTOVOLTAIC POWER APPARATUS, AND PHOTOVOLTAIC POWER APPARATUS
Document Type and Number:
WIPO Patent Application WO/2013/054396
Kind Code:
A1
Abstract:
This method for manufacturing a photovoltaic power apparatus includes: a first step wherein a recessed and projected structure is formed by forming recesses on one surface of a first conductivity-type or second conductivity-type crystalline semiconductor substrate; a second step wherein a first conductivity-type semiconductor film is formed on the one surface of the crystalline semiconductor substrate, said one surface including the insides of the recesses of the recessed and projected structure; a third step wherein an etching paste is applied to the insides of the recesses having the first conductivity-type semiconductor film formed therein, the surfaces of the recesses are exposed by removing, by etching, the first conductivity-type semiconductor film in the recesses, and first semiconductor bonded regions of the first conductivity-type semiconductor film and the crystalline semiconductor substrate are formed on the projections of the recessed and projected structure by leaving the first conductivity-type semiconductor film on the projections; a fourth step wherein the etching paste is removed; and a fifth step wherein second conductivity-type semiconductor films are formed in the exposed recesses, and second semiconductor bonded regions of the second conductivity-type semiconductor film and the crystalline semiconductor substrate are formed insides of the recesses.
Inventors:
SATO TAKEHIKO (JP)
HIZA SHUICHI (JP)
SAKAI MASASHI (JP)
OTA NARIHITO (JP)
MATSUNO SHIGERU (JP)
HIZA SHUICHI (JP)
SAKAI MASASHI (JP)
OTA NARIHITO (JP)
MATSUNO SHIGERU (JP)
Application Number:
PCT/JP2011/073342
Publication Date:
April 18, 2013
Filing Date:
October 11, 2011
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
SATO TAKEHIKO (JP)
HIZA SHUICHI (JP)
SAKAI MASASHI (JP)
OTA NARIHITO (JP)
MATSUNO SHIGERU (JP)
SATO TAKEHIKO (JP)
HIZA SHUICHI (JP)
SAKAI MASASHI (JP)
OTA NARIHITO (JP)
MATSUNO SHIGERU (JP)
International Classes:
H01L31/042
Domestic Patent References:
| WO2011093361A1 | 2011-08-04 | |||
| WO2009096539A1 | 2009-08-06 |
Foreign References:
| JP2005510885A | 2005-04-21 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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Claims: