METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR, AND PIEZOELECTRIC ACTUATOR

WIPO Patent Application WO/2006/073018

A1

A method for manufacturing a piezoelectric actuator in which a sintered body is prevented from chipping or cracking due to difference of shrinkage at the time of sintering, and a failure is not easily generated due to exposure of a dummy internal electrode of the outermost layer. A ceramic sintered body wherein internal electrodes are laid in layers through a piezoelectric ceramic layer, inactive parts (4, 5) are arranged at least on one side in the thickness direction of an active part (3) operating as the piezoelectric actuator, a plurality of dummy internal electrodes (8a-8c, 9a-9c) are arranged to be laid in layers through the ceramic layer at the inactive parts (4, 5), and the thickness of the ceramic layer sandwiched between the dummy internal electrodes increases as it recedes from the active part (3) is prepared. The piezoelectric ceramic layer of the ceramic sintered body located on the outermost side in the thickness direction is ground to be adjusted to the dimension of the ceramic sintered body in the thickness direction thus manufacturing the piezoelectric actuator (1).

OMURA SHINJI (JP)
HAYASHI KOICHI (JP)
KOBAYASHI SHOZO (JP)

PCT/JP2005/018920

July 13, 2006

October 14, 2005

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MURATA MANUFACTURING CO (JP)
OMURA SHINJI (JP)
HAYASHI KOICHI (JP)
KOBAYASHI SHOZO (JP)

H01L41/083; H01L41/187; H01L41/27; H01L41/293; H01L41/337; H02N2/00

JP2001352110A	2001-12-21
JP2002203999A	2002-07-19
JP2003101092A	2003-04-04
JPH09270540A	1997-10-14

Miyazaki, Chikara (5-4 Tanimachi 1-chome, Chuo-ku, Osaka-sh, Osaka 12, JP)

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