METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM - CSMC TECHNOLOGIES FAB1 CO LTD

Title:

METHOD FOR MANUFACTURING THIN-FILM SUPPORT BEAM

Document Type and Number:

WIPO Patent Application WO/2015/103910

Kind Code:

A1

Abstract:

A method for manufacturing a thin-film support beam comprises: providing a substrate having a first surface and a second surface disposed opposite to each other; coating a sacrificial layer on the first surface of the substrate, and patterning the sacrificial layer; depositing a dielectric film on the sacrificial layer to form a dielectric film layer, and depositing a metal film on the dielectric film layer to form a metal film layer; patterning the metal film layer, and dividing a patterned region of the metal film layer into a metal film pattern of a support beam part and a metal film pattern of a non-support beam part, the width of the metal film pattern of the support beam part being greater than that of a final support beam pattern and the width of the metal film pattern of the non-support beam part being equal to that of the final non-support beam pattern at this time; performing photolithographing and etching on the metal film layer and the dielectric film layer to form the final support beam pattern, the final non-support beam pattern and the final dielectric film layer, and the final dielectric film layer being used as support films of the final support beam pattern and the final non-support beam pattern at this time; and removing the sacrificial layer.

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Inventors:

JING ERRONG (CN)

Application Number:

PCT/CN2014/093054

Publication Date:

July 16, 2015

Filing Date:

December 04, 2014

Export Citation:

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Assignee:

CSMC TECHNOLOGIES FAB1 CO LTD (CN)

International Classes:

B81C1/00

Domestic Patent References:

WO2006118851A2	2006-11-09
WO2011126438A1	2011-10-13

Foreign References:

CN101381070A	2009-03-11
CN101289160A	2008-10-22
CN103241706A	2013-08-14
US20070281497A1	2007-12-06
US20110278566A1	2011-11-17

Attorney, Agent or Firm:

ADVANCE CHINA IP LAW OFFICE (CN)
广州华进联合专利商标代理有限公司 (CN)

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