METHOD FOR MEASURING THIN FILM THICKNESS

Title:

METHOD FOR MEASURING THIN FILM THICKNESS

Document Type and Number:

WIPO Patent Application WO/2016/171397

Kind Code:

A1

Abstract:

The present invention relates to a method for measuring thin film thickness, and comprises a reflectivity acquisition step, a refractive index assumption step, a conversion step, an error checking step, a phase extraction step, a phase restoration step, and a thickness calculation step. The reflectivity acquisition step acquires a light intensity signal of a thin film, and acquires a reflectivity of the thin film through the light intensity signal. The refractive index assumption step assumes the refractive index of air and the refractive index of the thin film to be a real number, and the refractive index of a substrate on which the thin film is formed to be a complex number. The conversion step converts the reflectivity into a normal reflectivity. The error checking step checks whether a first difference value, which is a difference between the maximum value of the normal reflectivity converted in the conversion step and a first reference value, or a second difference value, which is a difference between the minimum value of the normal reflectivity converted in the conversion step and a second reference value, falls within a preset error range. The phase extraction step extracts a phase when the first difference value or the second difference value falls within the error range. The phase restoration step restores the phase extracted in the phase extraction step. The thickness calculation step calculates a thickness of the thin film from the phase restored in the phase restoration step.

Inventors:

KIM KWANG RAK (KR)
KWON SOON YANG (KR)
PAHK HEUI JAE (KR)

Application Number:

PCT/KR2016/002801

Publication Date:

October 27, 2016

Filing Date:

March 21, 2016

Export Citation:

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Assignee:

SNU PRECISION CO LTD (KR)

International Classes:

G01B11/06; G01N21/41; G01N21/55; G01N21/84

Foreign References:

KR20080111723A	2008-12-24
JPH1123230A	1999-01-29
JP2006220525A	2006-08-24
JPH0495703A	1992-03-27
US6943895B2	2005-09-13

Attorney, Agent or Firm:

KIM, TAE WAN (KR)
김태완 (KR)

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