Title:
METHOD FOR PREPARING MULTI-FUNCTIONAL PROTECTIVE NANO COATING BY MEANS OF LOW-POWER CONTINUOUS DISCHARGE
Document Type and Number:
WIPO Patent Application WO/2018/214446
Kind Code:
A1
Abstract:
Disclosed is a method for preparing a multi-functional protective nano coating by means of low-power continuous discharge, which belongs to the technical field of plasma. In the method, a reaction cavity is vacuumized to reach a degree of vacuum of 10 to 200 millitorrs, and the inert gas He or Ar is introduced thereinto; a movement mechanism is started so that a substrate moves in the reaction cavity; monomer vapor is introduced into the reaction cavity; and plasma discharge is carried out for chemical vapor deposition. The deposition process comprises a preprocessing stage and a film-plating stage, wherein in the preprocessing stage, a plasma discharge mode is high-power continuous discharge, and in the film-plating stage, the plasma discharge mode is low-power continuous discharge. In the coating preparation process, the movement characteristics of the substrate and the discharge energy of the plasma are combined and linked. In the preparation process, the substrate moves while plasma discharge is carried out, thereby improving the coating deposition efficiency, and improving the uniformity and compactness of the coating thickness. The prepared coating has the characteristics of being waterproof, moisture proof, and fungusproof, acid and alkali solvent resistance, acid and alkali salt mist resistance, etc.
Inventors:
ZONG JIAN (CN)
Application Number:
PCT/CN2017/113188
Publication Date:
November 29, 2018
Filing Date:
November 27, 2017
Export Citation:
Assignee:
JIANGSU FAVORED NANOTECHNOLOGY CO LTD (CN)
International Classes:
C23C16/50; B82Y40/00; C23C16/02
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