Title:
METHOD FOR PRODUCING ALUMINUM OXIDE FILM, MATERIAL FOR PRODUCING ALUMINUM OXIDE FILM AND ALUMINUM COMPOUND
Document Type and Number:
WIPO Patent Application WO/2017/030150
Kind Code:
A1
Abstract:
Provided is a method for producing aluminum oxide film, including the step of forming an aluminum oxide film on the film-forming target by providing an aluminum compound represented by formula (1) on a heated film-forming target and oxidizing the aluminum compound. In formula (1), R represents a linear alkyl group having 1 to 2 carbon atoms, and multiple instances of R may be the same or different. t-Bu represents a tertiary butyl group.
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Inventors:
SHIRAI MASASHI (JP)
NIHEI HIROSHI (JP)
MIYAZAKI TAKAMASA (JP)
MUKAI JUNICHI (JP)
NIHEI HIROSHI (JP)
MIYAZAKI TAKAMASA (JP)
MUKAI JUNICHI (JP)
Application Number:
PCT/JP2016/074032
Publication Date:
February 23, 2017
Filing Date:
August 17, 2016
Export Citation:
Assignee:
UBE INDUSTRIES (JP)
International Classes:
H01L21/316; C07F5/06; C23C16/40
Domestic Patent References:
| WO2007015436A1 | 2007-02-08 |
Other References:
MEIER, ROBERT J. ET AL.: "A Role for Dinuclear Aluminum Amidinate Complexes in Ethlene Polymerization?", J. PHYS. CHEM. A, vol. 105, no. 15, April 2001 (2001-04-01), pages 3867 - 3874, XP055365791
CHANG, CHUNG-CHENG ET AL.: "Carbodiimide Insertion into Organoaluminum Compounds and Thermal Rearrangement of the Products", ORGANOMETALLICS, vol. 17, no. 8, April 1998 (1998-04-01), pages 1595 - 1601, XP055365794
CHANG, CHUNG-CHENG ET AL.: "Carbodiimide Insertion into Organoaluminum Compounds and Thermal Rearrangement of the Products", ORGANOMETALLICS, vol. 17, no. 8, April 1998 (1998-04-01), pages 1595 - 1601, XP055365794
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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