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Patent Searching and Data


Title:
METHOD FOR PRODUCING ARTICLE HAVING METAL FILM, AND METAL FILM PRODUCTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/029450
Kind Code:
A1
Abstract:
This method for producing an article having a metal film comprises: a step for vaporizing an organic compound containing a metal; and a step for forming a metal film by depositing the metal contained in the organic compound containing the vaporized metal on an object to be coated. This metal film production apparatus comprises: a chamber; a first heating part which is in the chamber and is for placing and heating an organic compound containing a metal in order to generate a gas of the organic compound containing the metal; and a second heating part which is in the chamber, faces the first heating part, and is for placing and heating an object to be coated.

Inventors:
TAKEUCHI NANAMI (JP)
OZAWA NAOTO (JP)
Application Number:
PCT/JP2023/027624
Publication Date:
February 08, 2024
Filing Date:
July 27, 2023
Export Citation:
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Assignee:
ORIGIN CO LTD (JP)
International Classes:
C23C16/06; C23C16/448
Foreign References:
JP2008007852A2008-01-17
JP2009033125A2009-02-12
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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