METHOD FOR PRODUCING CHAIN-LIKE PARTICLE DISPERSION, AND DISPERSION OF CHAIN-LIKE PARTICLES

WIPO Patent Application WO/2019/131874

A1

Provided is a method for producing a chain-like silica particle dispersion. The production method has: a dispersion preparation step for hydrolyzing an alkoxysilane in the presence of ammonia to produce a silica particle dispersion; an ammonia removal step for removing the ammonia from the silica particle dispersion and setting the amount of ammonia relative to silica contained in the silica particle dispersion to 0.3% by mass or less; and a hydrothermal treatment step for conducting hydrothermal treatment of the silica particle dispersion having a silica concentration of 12% by mass or higher from which the ammonia has been removed, the hydrothermal treatment being conducted at a temperature of at least 150°C and less than 250°C. An abrasive in which these chain-like silica particles are used has a high polishing rate and exceptional polishing characteristics.

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EGAMI MIKI (JP)
TANIGUCHI MASANOBU (JP)
KUMAZAWA MITSUAKI (JP)
MURAGUCHI RYO (JP)

PCT/JP2018/048128

July 04, 2019

December 27, 2018

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JGC CATALYSTS & CHEMICALS LTD (JP)

C01B33/18; B24B37/00; C01B33/146; H01L21/304

JP2005186435A	2005-07-14
JP2015029965A	2015-02-16
JPH1161043A	1999-03-05

OKUMACHI Tetsuyuki (JP)

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