Title:
METHOD FOR PRODUCING CLAY THIN FILM AND CLAY THIN FILM
Document Type and Number:
WIPO Patent Application WO/2007/034772
Kind Code:
A1
Abstract:
Disclosed is a method for producing a clay thin film having a surface flatness sufficient to be used as a film substrate for liquid crystal or organic EL displays. Specifically disclosed is a method for producing a clay thin film which is composed of a clay or a clay and an additive and has a structure wherein clay particles are oriented and arranged in layers. This method for producing a clay thin film is characterized by having a paste preparing step wherein a clay paste is prepared by dispersing a clay or a clay and an additive in a dispersion medium which is composed of water, an organic solvent or a mixed solvent of water and an organic solvent; a coating step wherein the clay paste is applied over a base for forming a thin film; a planarization step wherein the thin film is planarized; a drying step wherein water, the organic solvent or water and the organic solvent are removed from the thin film; and a separation step wherein the thin film is separated from the base. The surface roughness Ra of the clay thin film is not more than 100 nm.
Inventors:
TSUDA HAJIME (JP)
INOUE TOMOHITO (JP)
MOTEGI KATSUMI (JP)
EBINA TAKEO (JP)
MIZUKAMI FUJIO (JP)
INOUE TOMOHITO (JP)
MOTEGI KATSUMI (JP)
EBINA TAKEO (JP)
MIZUKAMI FUJIO (JP)
Application Number:
PCT/JP2006/318490
Publication Date:
March 29, 2007
Filing Date:
September 19, 2006
Export Citation:
Assignee:
TOMOEGAWA CO LTD (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
TSUDA HAJIME (JP)
INOUE TOMOHITO (JP)
MOTEGI KATSUMI (JP)
EBINA TAKEO (JP)
MIZUKAMI FUJIO (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
TSUDA HAJIME (JP)
INOUE TOMOHITO (JP)
MOTEGI KATSUMI (JP)
EBINA TAKEO (JP)
MIZUKAMI FUJIO (JP)
International Classes:
G02F1/1333; C01B33/40; H01L51/50; H05B33/02
Foreign References:
| JP2005104133A | 2005-04-21 | |||
| JPH06293012A | 1994-10-21 |
Other References:
EBINA T.: "Junan de Tainetsusei ni Sugureta Mukimaku 'Claist' no Kaihatsu", AIST TODAY, vol. 5, no. 6, June 2005 (2005-06-01), pages 9, XP003010841
EBINA T.: "Kotainetsusei muki Gas-Barrier Zairyo 'Clais' no Kaihatsu", MATERIAL STAGE, vol. 4, no. 11, February 2005 (2005-02-01), pages 64 - 67, XP003010842
See also references of EP 1944270A4
EBINA T.: "Kotainetsusei muki Gas-Barrier Zairyo 'Clais' no Kaihatsu", MATERIAL STAGE, vol. 4, no. 11, February 2005 (2005-02-01), pages 64 - 67, XP003010842
See also references of EP 1944270A4
Attorney, Agent or Firm:
SHIGA, Masatake et al. (Yaesu Chuo-ku, Tokyo, JP)
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