Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/171014
Kind Code:
A1
Abstract:
This method for producing a semiconductor device has: a first step for forming a flat silicon layer (107) on a silicon substrate (101), and forming a first and a second columnar silicon layer (104, 105) on the flat silicon layer; a second step for forming a gate-insulating film (113) around the periphery of the first and second columnar silicon layers, forming a metal film (115) and a polysilicon film (116) around the periphery of the gate-insulating film, setting the film thickness of the polysilicon film so as to be thinner than half the length of the interval between the first and second columnar silicon layers, depositing a third resist (117), exposing the polysilicon film on the upper-section-side wall of the first and second columnar semiconductor layers, removing the exposed polysilicon film by etching, detaching the third resist, and removing the metal film by etching; and a third step for forming a fourth resist (118) for forming gate wiring (119c), performing an anisotropic etching, and forming the gate wiring, a first gate electrode, and a second gate electrode.

More Like This:
JP2679390[Title of Invention] Code setting circuit
JP2776891[Title of Invention] Semiconductor integrated circuit device
JP2005303261SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
Inventors:
MASUOKA FUJIO (JP)
HARADA NOZOMU (JP)
NAKAMURA HIROKI (JP)
LI YISUO (SG)
KAMATH AASHIT RAMACHANDRA (SG)
CHEN ZHIXIAN (SG)
PHUA TENG SOONG (SG)
WANG XINPENG (SG)
LO PATRICK GUO-QIANG (SG)
Application Number:
PCT/JP2013/061653
Publication Date:
October 23, 2014
Filing Date:
April 19, 2013
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
UNISANTIS ELECT SINGAPORE PTE (SG)
MASUOKA FUJIO (JP)
HARADA NOZOMU (JP)
NAKAMURA HIROKI (JP)
LI YISUO (SG)
KAMATH AASHIT RAMACHANDRA (SG)
CHEN ZHIXIAN (SG)
PHUA TENG SOONG (SG)
WANG XINPENG (SG)
LO PATRICK GUO-QIANG (SG)
International Classes:
H01L21/8238; H01L21/28; H01L21/336; H01L27/04; H01L27/092; H01L29/423; H01L29/49; H01L29/78
Foreign References:
JP2012004244A2012-01-05
JP2011258780A2011-12-22
JP2009182317A2009-08-13
JP2010272874A2010-12-02
Attorney, Agent or Firm:
KIMURA MITSURU (JP)
Mitsuru Kimura (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: BATTERY SYSTEM MONITORING DEVICE

Next Patent: LAMP DRIVE POWER SUPPLY AND METHOD FOR CONTROLLING LAMP DRIVE POWER SUPPLY