Title:
METHOD FOR RECOVERING PLATINUM GROUP METAL, METHOD FOR MANUFACTURING FILM CONTAINING PLATINUM GROUP METAL, AND FILM-FORMING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/246340
Kind Code:
A1
Abstract:
A method according to the present invention is for recovering a platinum group metal present within a film formation chamber after introducing a feedstock gas containing the platinum group metal into the film formation chamber and forming a film containing the platinum group metal on the surface of a substrate housed within the film formation chamber. The method is provided with: (i) a step for introducing a fluorine-containing cleaning gas into the film formation chamber after the substrate has been removed therefrom; and (ii) a step for introducing the cleaning gas discharged from the film formation chamber into a scavenging container that holds a scavenger comprising at least one selected from the group consisting of soda lime, slaked lime, and CaO.
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Inventors:
MANABE TOSHIKI (JP)
IZUMI KOICHI (JP)
SHOJO TADASHI (JP)
NAGAYAMA RYOTARO (JP)
IZUMI KOICHI (JP)
SHOJO TADASHI (JP)
NAGAYAMA RYOTARO (JP)
Application Number:
PCT/JP2021/020529
Publication Date:
December 09, 2021
Filing Date:
May 28, 2021
Export Citation:
Assignee:
IWATANI CORP (JP)
International Classes:
C23C16/44; C22B3/06; C22B7/00; C22B11/00; C23C16/16; H01L21/28; H01L21/285
Foreign References:
| JPH04311570A | 1992-11-04 | |||
| JPS62273038A | 1987-11-27 | |||
| JP2001342566A | 2001-12-14 | |||
| JPS62238337A | 1987-10-19 | |||
| JP2004190092A | 2004-07-08 | |||
| JPH10279317A | 1998-10-20 | |||
| JP2005185961A | 2005-07-14 |
Attorney, Agent or Firm:
KITANO, Shuhei et al. (JP)
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