Title:
METHOD FOR REGULATING OUTPUT POWER OF 213 NM LASER, AND APPARATUS THEREOF
Document Type and Number:
WIPO Patent Application WO/2022/110284
Kind Code:
A1
Abstract:
Provided are a method for regulating the output power of a 213 nm laser, and an apparatus thereof, said method comprising: setting the temperature of a frequency tripling crystal (21) (S1); using the frequency tripling crystal (21) to output a 532 nm laser and a 355 nm laser (S2); summing the frequencies of the 532 nm laser and the 355 nm laser to obtain a 213 nm laser, and recording the output power of the 213 nm laser (S3); repeating the described steps (S1-S3) multiple times, the temperature of the frequency tripling crystal (21) being set differently each time, and recording the output power of the 213 nm laser at different temperatures to obtain a correlation between the temperature of the frequency tripling crystal (21) and the output power of the 213 nm laser (S4); according to said correlation, adjusting the temperature of the frequency tripling crystal (21) so as to regulate the output power of the 213 nm laser (S5).
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Inventors:
REN JUNJIE (CN)
WANG JIAZAN (CN)
JIANG RUI (CN)
LIU GUANGYI (CN)
CHEN BINBIN (CN)
WANG JIAZAN (CN)
JIANG RUI (CN)
LIU GUANGYI (CN)
CHEN BINBIN (CN)
Application Number:
PCT/CN2020/134296
Publication Date:
June 02, 2022
Filing Date:
December 07, 2020
Export Citation:
Assignee:
BEIJING RSLASER OPTO ELECTRONICS TECH CO LTD (CN)
International Classes:
H01S3/102; H01S3/10; H01S3/109
Foreign References:
| CN111106521A | 2020-05-05 | |||
| CN104810718A | 2015-07-29 | |||
| CN111740297A | 2020-10-02 | |||
| CN101106252A | 2008-01-16 | |||
| CN105379032A | 2016-03-02 | |||
| JPH0542382A | 1993-02-23 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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