Title:
METHOD AND RESULTING DEVICE FOR FABRICATING ELECTRET MATERIALS ON BULK SUBSTRATES
Document Type and Number:
WIPO Patent Application WO2003105305
Kind Code:
A3
Abstract:
An electret device. The device has a thickness of substrate material (101) having a contact region (107). An electrically floating conducting region (111) is formed overlying the thickness of substrate material (101). A protective layer (113) is formed overlying the floating conductive layer (111). The protective layer (113) has a surface region and seals the floating conducting region (111). The thickness of substrate material (101), floating conducting region (111), and protective layer (113) form a sandwiched structure having a charge density of at least 1 X 10<-4> Coulombs/m<2> and a peak to peak charge uniformity of 5 % and less.
Inventors:
BOLAND JUSTIN
TAI YU-CHONG
TAI YU-CHONG
Application Number:
PCT/US2003/017596
Publication Date:
June 24, 2004
Filing Date:
June 04, 2003
Export Citation:
Assignee:
CALIFORNIA INST OF TECHN (US)
International Classes:
H02N1/08; (IPC1-7): H01G7/02; H01L21/263; H01L27/01; H04R19/01
Foreign References:
| US5677965A | 1997-10-14 | |||
| US6243474B1 | 2001-06-05 | |||
| US5565717A | 1996-10-15 | |||
| US20030112096A1 | 2003-06-19 |
Other References:
ZOU Q.B. ET AL.: "Design and fabrication of a novel integrated floating-electrode-“electret&rdquo-micropho (FFEM)", IEEE, MICRO ELECTRO MECHANICAL SYSTEMS, January 1998 (1998-01-01), pages 586 - 590, XP000829227
YASUFUSA TADA: "Experimental characteristics of electret generator, using polymer film electrets", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 31, March 1992 (1992-03-01), pages 846 - 851, XP000323150
BOLAND J. ET AL.: "Micro electret power generator", IEEE, MICRO ELECTRO MECHANICAL SYSTEMS, March 2003 (2003-03-01), pages 538 - 541, XP010637028
YASUFUSA TADA: "Experimental characteristics of electret generator, using polymer film electrets", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 31, March 1992 (1992-03-01), pages 846 - 851, XP000323150
BOLAND J. ET AL.: "Micro electret power generator", IEEE, MICRO ELECTRO MECHANICAL SYSTEMS, March 2003 (2003-03-01), pages 538 - 541, XP010637028
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