Title:
METHOD FOR STABILIZING CHLOROSILANE POLYMER
Document Type and Number:
WIPO Patent Application WO/2018/092448
Kind Code:
A1
Abstract:
The present invention can easily stabilize a chlorosilane polymer without involving generation of a solid chlorosilane polymer. This method for stabilizing a chlorosilane polymer which is secondarily generated at a step of a chemical vapor deposition method using a chlorosilane-based gas, comprises: a step (S11) for diluting the chlorosilane polymer in an alcohol by bringing the chlorosilane polymer into contact with the alcohol to decompose the chlorosilane polymer into an alkoxide, hydrogen chloride, and hydrogen; and a step (S12) for hydrolyzing the alkoxide.
Inventors:
TANAKA YASUTOMO (JP)
OOTSUKA YUUTA (JP)
KUBOTA WATARU (JP)
ISHIZAKI MASATO (JP)
HOTOZUKA KOZUE (JP)
OOTSUKA YUUTA (JP)
KUBOTA WATARU (JP)
ISHIZAKI MASATO (JP)
HOTOZUKA KOZUE (JP)
Application Number:
PCT/JP2017/035981
Publication Date:
May 24, 2018
Filing Date:
October 03, 2017
Export Citation:
Assignee:
IHI CORP (JP)
International Classes:
C01B33/107; C23C16/44
Foreign References:
| JP2016013965A | 2016-01-28 | |||
| JPS645904A | 1989-01-10 | |||
| JPH04124011A | 1992-04-24 | |||
| JP2016013965A | 2016-01-28 | |||
| JP2016013966A | 2016-01-28 |
Other References:
See also references of EP 3543211A4
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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