Title:
METHOD AND SYSTEM FOR ASSESSING A MEASUREMENT PROCEDURE AND MEASUREMENT-INDUCED UNCERTAINTIES ON A BATCHWISE MANUFACTURING PROCESS OF DISCRETE PRODUCTS
Document Type and Number:
WIPO Patent Application WO1998018066
Kind Code:
A3
Abstract:
In the testing of certain discrete devices, such as integrated circuits, it has been found that variations in measurements are often caused by error terms from the measurement equipment and process. The invention provides a statistical process control (SPC) method and apparatus that determines the errors introduced by the measurement equipment and process. Statistical processes are provided to compensate for these errors and improve the accuracy of the testing process. The measurement errors are based upon repeated independent measurements of select parameters of each unit tested.
Inventors:
VAN BOXEM GERARDUS JOHANNES CO
Application Number:
PCT/IB1997/001141
Publication Date:
June 04, 1998
Filing Date:
September 22, 1997
Export Citation:
Assignee:
PHILIPS ELECTRONICS NV (NL)
PHILIPS NORDEN AB (NL)
PHILIPS NORDEN AB (NL)
International Classes:
G01R31/00; G01R31/319; G05B19/418; H01L21/02; H01L21/66; (IPC1-7): G05B19/418
Foreign References:
| US5239456A | 1993-08-24 | |||
| US5440478A | 1995-08-08 | |||
| US5327437A | 1994-07-05 |
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