METHOD AND SYSTEM FOR COUPLING WAVEGUIDES

Title:

METHOD AND SYSTEM FOR COUPLING WAVEGUIDES

Document Type and Number:

WIPO Patent Application WO2004095519

Kind Code:

A3

Abstract:

A method for photonically coupling to at least one active photonic device structure formed on a substrate, the method including: etching the active device structure (310) with a high selectivity towards a crystallographic plane to form a sloped terminus with respect to the substrate (370); and, depositing at least one waveguide (315) over the etched terminus and at least a portion of the substrate (370); wherein, the waveguide (315) is photonically coupled to the etched active device structure (310) to provide photonic interconnectivity for the etched active device structure.

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Inventors:

ABELES JOSEPH (RU)
CAPEWELL DAVID (US)
DIMARCO LOU (US)
KWAKERNAAK MARTIN (US)
MALEY NAGENDRANATH (US)
MOHSENI HOOMAN (US)
WHALEY RALPH (US)
YANG LIYOU (US)

Application Number:

PCT/US2004/012634

Publication Date:

May 06, 2005

Filing Date:

April 23, 2004

Export Citation:

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Assignee:

DEWELL CORP (KR)
ABELES JOSEPH (RU)
CAPEWELL DAVID (US)
DIMARCO LOU (US)
KWAKERNAAK MARTIN (US)
MALEY NAGENDRANATH (US)
MOHSENI HOOMAN (US)
WHALEY RALPH (US)
YANG LIYOU (US)

International Classes:

G02B6/12; G02B6/122; G02B6/132; G02B6/42; H01L33/00; H01L33/44; H01L33/48; (IPC1-7): G02B6/30

Foreign References:

US20020176467A1	2002-11-28
US5173447A	1992-12-22
US6455880B1	2002-09-24
US5304283A	1994-04-19

Other References: