Title:
METHOD AND SYSTEM FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM COMB STRUCTURE, AND COMB STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2023/020336
Kind Code:
A1
Abstract:
A method and system for manufacturing a microelectromechanical system comb structure, and a comb structure. The method comprises: separately forming a fixed member blank (302) and a movable member blank (301) of a comb structure, the fixed member blank comprising a fixed member base plate (1011) and fixed member comb teeth (1012), and the movable member blank comprising a movable member riveting portion (1021) and movable member comb teeth (1022); mounting the movable member blank onto the fixed member blank in a mounting direction perpendicular to the fixed member blank, so that the fixed member comb teeth and the movable member comb teeth are arranged at intervals; and fixing the movable member riveting portion to the fixed member base plate to form the comb structure. A comb tooth structure having the comb tooth aspect ratio higher than that of a comb tooth structure manufactured by a conventional manufacturing method can be obtained, and the consistency of gaps between the comb teeth can be ensured, thereby improving the performance of the comb tooth structure.
Inventors:
GAO YUHAO (CN)
CHEN SHASHA (CN)
WEI LIQING (CN)
CHEN SHASHA (CN)
WEI LIQING (CN)
Application Number:
PCT/CN2022/111206
Publication Date:
February 23, 2023
Filing Date:
August 09, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
B81B5/00; B81C1/00
Foreign References:
| CN1417615A | 2003-05-14 | |||
| US4880308A | 1989-11-14 | |||
| CN1490240A | 2004-04-21 | |||
| US20020021055A1 | 2002-02-21 | |||
| JP2000147419A | 2000-05-26 | |||
| US6686639B1 | 2004-02-03 |
Attorney, Agent or Firm:
KING & WOOD MALLESONS (CN)
Download PDF:
Previous Patent: PRINTED CIRCUIT BOARD ASSEMBLY AND DESIGN AND MANUFACTURING METHOD THEREFOR
Next Patent: DISPLAY MODULE AND ELECTRONIC DEVICE
Next Patent: DISPLAY MODULE AND ELECTRONIC DEVICE