Title:
METHOD FOR TRANSFERRING THIN FILM, METHOD FOR MANUFACTURING THIN FILM TRANSISTOR, AND METHOD FOR FORMING PIXEL ELECTRODE OF LIQUID CRYSTAL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/126041
Kind Code:
A1
Abstract:
This method for transferring a thin film is a method for transferring a thin film that is formed on a first substrate to a second substrate. This method for transferring a thin film comprises: a process for causing the first substrate to swell by bringing the first substrate into contact with a liquid; a process for bringing the second substrate and the thin film into contact with each other, with the liquid being interposed therebetween; and a process for causing the thin film to adhere to the second substrate by drying the liquid.
Inventors:
NAKAZUMI MAKOTO (JP)
NISHI YASUTAKA (JP)
NISHI YASUTAKA (JP)
Application Number:
PCT/JP2014/053043
Publication Date:
August 21, 2014
Filing Date:
February 10, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02F1/1368; H01L21/02; H01L21/336; H01L27/12; H01L29/786
Domestic Patent References:
| WO2007083570A1 | 2007-07-26 | |||
| WO2014020906A1 | 2014-02-06 |
Foreign References:
| JP2003017666A | 2003-01-17 | |||
| JP2003229588A | 2003-08-15 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
Download PDF: