Title:
MICRO-ELECTROCMECHAMICAL SENSOR (MEMS) RESONATOR
Document Type and Number:
WIPO Patent Application WO2001087767
Kind Code:
A3
Abstract:
A micro-electromechanical structure (MEMS) usable as actuator or sensor device that is mechanically robust while it is subject to various frequencies and sudden changes in frequencies while it measures signals, and converts the mechanical signals to electrical signals for data storage and analysis that includes mechanical arms on which a resistor is etched using well-known lithographic techniques. A mechanical arm can be designed to measure a different frequency, and the mechanical arm thickness, length, and width determine the frequency to which a respective arm will resonate. An arm can be connected to operational circuitry through the etched resistor to record the mechanical vibrations of the respective mechanical arm. Multiple mechanical arms in two directions can be designed to measure frequencies in two orthogonal directions. The mechanical arms can be actuated statically or dynamically, by mechanical, acoustic, electro-magnetic, thermal, or humidity stimuli. The elasticity is obtained by creating thin slices of silicon that support IC's and by bonding them into multi-layered stacks.
Inventors:
DE SCHRIJVER STEFAAN (US)
Application Number:
PCT/US2001/016061
Publication Date:
April 11, 2002
Filing Date:
May 17, 2001
Export Citation:
Assignee:
SCHRIJVER STEFAAN DE (US)
International Classes:
B81B3/00; B81B7/02; H03H9/24; (IPC1-7): B81B3/00; B81B7/02
Domestic Patent References:
| WO2000026653A1 | 2000-05-11 |
Foreign References:
| DE19528961A1 | 1997-02-13 | |||
| DE19844686A1 | 2000-04-06 | |||
| EP0836151A1 | 1998-04-15 | |||
| US5922212A | 1999-07-13 | |||
| EP0574697A1 | 1993-12-22 | |||
| US4762426A | 1988-08-09 | |||
| US5688721A | 1997-11-18 |
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