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Title:
MICRO SWITCHING ELEMENT AND METHOD OF MANUFACTURING THE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2005/015595
Kind Code:
A1
Abstract:
A micro switching element (X1), comprising a frame (11), a comb electrode part (12), a pair of fixed contact electrodes (13) separated from each other, a movable part (20), a set of support beams (30A) and a set of support beams (30B) for connecting the movable part (20) to the frame (11), the movable part (20) further comprising a comb electrode part (23) for generating a static electricity force in association with the comb electrode part (12) and a movable contact electrode (21) opposed to the fixed contact electrodes (13), wherein the fixed contact electrodes (13) and the movable contact electrode (21) are allowed to displace from each other between the contacted position and the separated position thereof, and the set of the support beams (30A) and the set of the support beams (30B) are separated from each other in the direction of the displacement of the movable part (20).

Inventors:
NAKATANI TADASHI (JP)
MIYASHITA TSUTOMU (JP)
SATOH YOSHIO (JP)
Application Number:
PCT/JP2003/010100
Publication Date:
February 17, 2005
Filing Date:
August 07, 2003
Export Citation:
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Assignee:
FUJITSU LTD (JP)
FUJITSU MEDIA DEVICES LTD (JP)
NAKATANI TADASHI (JP)
MIYASHITA TSUTOMU (JP)
SATOH YOSHIO (JP)
International Classes:
H01H59/00; (IPC1-7): H01H59/00
Foreign References:
JPH09251834A1997-09-22
JPS518438U1976-01-22
EP1246215A12002-10-02
EP1255268A12002-11-06
JPH0554782A1993-03-05
JP2000348593A2000-12-15
JP2001291463A2001-10-19
JPH11176307A1999-07-02
JPH0313695B21991-02-25
JPH08509093A1996-09-24
Attorney, Agent or Firm:
Yoshida, Minoru (Tamatsukuri-motomachi Tennoji-k, Osaka-shi Osaka, JP)
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