Title:
MICROELECTRONIC SYSTEM WITH INTEGRAL CYROCOOLER, AND ITS FABRICATION AND USE
Document Type and Number:
WIPO Patent Application WO2003025476
Kind Code:
A3
Abstract:
A microelectronic system (20) includes a substrate (22) that is preferably silicon and a microelectronic device (24) supported on the substrate (22). The microelectronic device (24) may be a light sensor that include a readout integrated circuit formed in the silicon substrate (22), and a light detector (28) supported on and electrically interconnected with the readout integrated circuit (26). A cryocooler (30) formed in and integral with the substrate (22) includes a gas inflow channel (36) formed in the substrate (22), an expansion nozzle (42) formed in the substrate (22) and receiving a gas flow from the gas inflow channel (36), and a gas outflow channel (48) that receives the gas flow from the outlet of the expansion nozzle (42). The gas inflow channel (36) and the gas outflow channel (48) may be countercurrent spirals.
Inventors:
SOBEL LARRY D
CAPARA JEFF G
CAPARA JEFF G
Application Number:
PCT/US2002/027326
Publication Date:
February 05, 2004
Filing Date:
August 29, 2002
Export Citation:
Assignee:
RAYTHEON CO (US)
International Classes:
F17C13/00; F25B9/02; H01L23/44; (IPC1-7): H01L23/467; H01L31/024; H01L23/473
Foreign References:
| US4682032A | 1987-07-21 | |||
| US6242778B1 | 2001-06-05 | |||
| US5870823A | 1999-02-16 | |||
| EP1047294A1 | 2000-10-25 |
Other References:
PRADEEP NARAYANAN S ET AL: "Performance of a counterflow heat exchanger with heat loss through the wall at the cold end", CRYOGENICS, IPC SCIENCE AND TECHNOLOGY PRESS LTD. GUILDFORD, GB, vol. 39, no. 1, January 1999 (1999-01-01), pages 43 - 52, XP004162599, ISSN: 0011-2275
PATENT ABSTRACTS OF JAPAN vol. 009, no. 115 (E - 315) 18 May 1985 (1985-05-18)
CHRISTENSEN R G: "Water Cooled Heat Transfer Plate. September 1980.", IBM TECHNICAL DISCLOSURE BULLETIN, vol. 23, no. 4, 1 September 1980 (1980-09-01), New York, US, pages 1445 - 1446, XP002249684
PATENT ABSTRACTS OF JAPAN vol. 009, no. 115 (E - 315) 18 May 1985 (1985-05-18)
CHRISTENSEN R G: "Water Cooled Heat Transfer Plate. September 1980.", IBM TECHNICAL DISCLOSURE BULLETIN, vol. 23, no. 4, 1 September 1980 (1980-09-01), New York, US, pages 1445 - 1446, XP002249684
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