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Title:
MICROFABRICATED OBJECT, METHOD FOR MANUFACTURING SAME, AND ETCHING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/074190
Kind Code:
A1
Abstract:
A method for fabricating a microfabricated object is provided with a step for depositing an inorganic resist layer on an original disk having a curved surface, a step for forming a pattern on the inorganic resist layer deposited on the original disk by exposing and developing the inorganic resist layer, a step for fabricating the microfabricated object by disposing the original disk, above which the pattern is formed on the organic resist layer, on an electrode having a curved surface that is approximately the same as or similar to the curved surface of the original disk, etching the original disk, and forming a concavo-convex shape on the surface of the original disk.

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Inventors:
ENDOH SOHMEI (JP)
HAYASHIBE KAZUYA (JP)
SHIMIZU KOICHIRO (JP)
Application Number:
PCT/JP2009/071520
Publication Date:
July 01, 2010
Filing Date:
December 17, 2009
Export Citation:
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Assignee:
SONY CORP (JP)
ENDOH SOHMEI (JP)
HAYASHIBE KAZUYA (JP)
SHIMIZU KOICHIRO (JP)
International Classes:
G02F1/1335; B29C33/38; B29C33/42; G02B1/02; G02B1/11; G02B1/118; B29L11/00
Foreign References:
JP2001023972A2001-01-26
JP2008304637A2008-12-18
JP2000121802A2000-04-28
JP2008256838A2008-10-23
JP2008226340A2008-09-25
Attorney, Agent or Firm:
SUGIURA, Masatomo (JP)
Masatomo Sugiura (JP)
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