Title:
MICROFILTER AND ACOUSTIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/258361
Kind Code:
A1
Abstract:
A microfilter and an acoustic device, comprising a substrate (1) provided with a back cavity (3), and a film layer (2) that is disposed on the substrate (1) and that is suspended on the back cavity (3); the film layer (2) is provided with distributed through holes (4), and the film layer (2) comprises at least one layer of a first diaphragm (2a) having tensile stress and at least one layer of a second diaphragm (2b) having compressive stress, which are composited together; the first diaphragm (2a) and the second diaphragm (2b) are configured to reduce the stress on the entire film layer (2) so as to control the stress on the entire film layer (2) to be within a desired range.
Inventors:
LIN YUJING (CN)
Application Number:
PCT/CN2019/094774
Publication Date:
December 30, 2020
Filing Date:
July 05, 2019
Export Citation:
Assignee:
WEIFANG GOERTEK MICROELECTRONICS CO LTD (CN)
International Classes:
H04R1/08; B01D46/54
Foreign References:
| CN109890748A | 2019-06-14 | |||
| CN1901758A | 2007-01-24 | |||
| CN1942022A | 2007-04-04 | |||
| CN109379684A | 2019-02-22 | |||
| CN1960581A | 2007-05-09 | |||
| US20110215672A1 | 2011-09-08 |
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