Title:
MICROMACHINED ARRAYED THERMAL PROBE APPARATUS AND SYSTEM FOR THERMAL SCANNING
Document Type and Number:
WIPO Patent Application WO2005069802
Kind Code:
A3
Abstract:
A relatively simple and inexpensive micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein can be used for a variety of microscopy and microcalorimetry applications ranging from the monitoring of processes in semiconductor manufacturing to the characterization of nano-scale materials, imaging of biological cells, and even data storage. Probes are designed to have very high thermal isolation and high mechanical compliance, providing advantages in both performance and ease of operation. In particular, an array of probes can be used for high throughput contact mode scanning of soft samples without mechanical feedback, and can, therefore, be used in wide arrays for high-speed measurements over large sample surfaces. The probes are preferably manufactured by a photolithographic fabrication process, which permits large numbers of probes to be made in a uniform and reproducible manner at low cost.
Inventors:
GIANCHANDANI YOGESH B (US)
MCNAMARA SHAMUS P (US)
LEE JOOHYUNG (US)
BASU AMAR (US)
MCNAMARA SHAMUS P (US)
LEE JOOHYUNG (US)
BASU AMAR (US)
Application Number:
PCT/US2005/001001
Publication Date:
January 26, 2006
Filing Date:
January 13, 2005
Export Citation:
Assignee:
UNIV MICHIGAN (US)
GIANCHANDANI YOGESH B (US)
MCNAMARA SHAMUS P (US)
LEE JOOHYUNG (US)
BASU AMAR (US)
GIANCHANDANI YOGESH B (US)
MCNAMARA SHAMUS P (US)
LEE JOOHYUNG (US)
BASU AMAR (US)
International Classes:
G01K7/02; G01K7/18; G01K17/00; (IPC1-7): G01K7/00
Foreign References:
| US20030081651A1 | 2003-05-01 | |||
| US5574279A | 1996-11-12 | |||
| US20020110177A1 | 2002-08-15 | |||
| US5751686A | 1998-05-12 | |||
| US20040119490A1 | 2004-06-24 | |||
| US6066265A | 2000-05-23 | |||
| US5929438A | 1999-07-27 | |||
| US6337477B1 | 2002-01-08 | |||
| US20030169798A1 | 2003-09-11 | |||
| US5441343A | 1995-08-15 | |||
| US5388323A | 1995-02-14 | |||
| US5923637A | 1999-07-13 |
Other References:
LI M.H. ET AL: "Applications Of A Low Contact Force Polyimide Shank Bolometer Probe For Chemical And Biological Diagnostics", SENSORS AND ACTUATORS, vol. 104, no. 2003, 2003, pages 236 - 245, XP004423406
LI M.H. ET AL: "Surface Micromachined Polyimide Scanning Thermocouple Probes", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 10, no. 1, March 2001 (2001-03-01), XP001123701
LI M.H. ET AL: "Microcalorimetry Applications Of A Surface Micromachined Bolometer-type Thermal Probe", JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, vol. 18, no. 6, November 2000 (2000-11-01) - December 2000 (2000-12-01), pages 3600 - 3603, XP012008625
LI M.H. ET AL: "High Performance Scanning Thermal Probe Using A Low Temperature Polyimide-Based Micromachining Process", IEEE INT. CONF. ON MICROELECTROMECHANICAL SYSTEMS (MEMS ยด2000), January 2000 (2000-01-01), MIYAZAKI, JAPAN, XP010377224
LI M.H. ET AL: "Surface Micromachined Polyimide Scanning Thermocouple Probes", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 10, no. 1, March 2001 (2001-03-01), XP001123701
LI M.H. ET AL: "Microcalorimetry Applications Of A Surface Micromachined Bolometer-type Thermal Probe", JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, vol. 18, no. 6, November 2000 (2000-11-01) - December 2000 (2000-12-01), pages 3600 - 3603, XP012008625
LI M.H. ET AL: "High Performance Scanning Thermal Probe Using A Low Temperature Polyimide-Based Micromachining Process", IEEE INT. CONF. ON MICROELECTROMECHANICAL SYSTEMS (MEMS ยด2000), January 2000 (2000-01-01), MIYAZAKI, JAPAN, XP010377224
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